Controlled Thermal Oxidation of Sacrificial Silicon on 4H-SiC Epilayer: Fid-Bau Portal

Controlled Thermal Oxidation of Sacrificial Silicon on 4H-SiC Epilayer

Koh, A. / Kestle, A. / Dunstan, P. R. / Pritchard, M. / Wilks, S. P. / Pope, G. / Mawby, P. A.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Controlled Thermal Oxidation of Sacrificial Silicon on 4H-SiC Epilayer

Koh, A. / Kestle, A. / Dunstan, P. R. / Pritchard, M. / Wilks, S. P. / Pope, G. / Mawby, P. A.

Controlled Thermal Oxidation of Sacrificial Silicon on 4H-SiC Epilayer

Koh, A. / Kestle, A. / Dunstan, P. R. / Pritchard, M. / Wilks, S. P. / Pope, G. / Mawby, P. A.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Controlled Thermal Oxidation of Sacrificial Silicon on 4H-SiC Epilayer

Contributors:

Koh, A. (author) / Kestle, A. (author) / Dunstan, P. R. (author) / Pritchard, M. (author) / Wilks, S. P. (author) / Pope, G. (author) / Mawby, P. A. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 1081-1084

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Koh, A. / Kestle, A. / Wilks, S. P. et al. | British Library Online Contents | 2000

Comparative surface studies on wet and dry sacrificial thermal oxidation on silicon carbide

Koh, A. / Kestle, A. / Wright, C. et al. | British Library Online Contents | 2001

Thick Epilayer for Power Devices

Henry, A. / Hassan, J. / Pedersen, H. et al. | British Library Online Contents | 2007

Ellipsometric Study of Thermal Silicon Oxide and Sacrificial Silicon Oxide on 4H-SiC

Chen, L. / Guy, O. J. / Pope, G. et al. | British Library Online Contents | 2004

Influence of precipitates on GaN epilayer quality

Kang, J. / Huang, Q. / Wang, Z. | British Library Online Contents | 2000