Improved Epilayer Surface Morphology on 2^o Off-Cut 4H-SiC Substrates: Fid-Bau Portal

Improved Epilayer Surface Morphology on 2^o Off-Cut 4H-SiC Substrates

Lilja, L. / Hassan, J.u. / Janzen, E. / Bergman, P.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Improved Epilayer Surface Morphology on 2^o Off-Cut 4H-SiC Substrates

Lilja, L. / Hassan, J.u. / Janzen, E. / Bergman, P.

Improved Epilayer Surface Morphology on 2^o Off-Cut 4H-SiC Substrates

Lilja, L. / Hassan, J.u. / Janzen, E. / Bergman, P.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Improved Epilayer Surface Morphology on 2^o Off-Cut 4H-SiC Substrates

Contributors:

Lilja, L. (author) / Hassan, J.u. (author) / Janzen, E. (author) / Bergman, P. (author) / Okumura, H. / Harima, H. / Kimoto, T. / Yoshimoto, M. / Watanabe, H. / Hatayama, T.

Published in:

Silicon Carbide and Related Materials 2013 PART 1 Selected, peer reviewed papers from the 15^t^h International Conference on Silicon Carbide and Related Materials, (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan ; 206-209

MATERIALS SCIENCE FORUM ; 778/780

Publication date:

2014-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Su, S. / Zhang, D. / Xue, C. et al. | British Library Online Contents | 2015

Stress State of GaN Epilayer Grown on Sapphire and 6H-SiC Substrates

Zhang, K. / Liang, H. / Song, S. et al. | British Library Online Contents | 2013

Dislocation in 4H n^+ SiC Substrates and their Relationship with Epilayer Defects

Wu, P. / Emorhokpor, E. / Yoganathan, M. et al. | British Library Online Contents | 2007

Thick Epilayer for Power Devices

Henry, A. / Hassan, J. / Pedersen, H. et al. | British Library Online Contents | 2007

Surface Studies on Thermal Oxidation on 4H-SiC Epilayer

Koh, A. / Kestle, A. / Wilks, S. P. et al. | British Library Online Contents | 2000