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Preparation and structure of unhydrogenated microcrystalline silicon thin films by sputtering
Preparation and structure of unhydrogenated microcrystalline silicon thin films by sputtering
Preparation and structure of unhydrogenated microcrystalline silicon thin films by sputtering
Ehara, T. (author) / Nagasawa, T. (author)
MATERIALS LETTERS ; 44 ; 223-227
2000-01-01
5 pages
Article (Journal)
English
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