Comparative EPR study of hydrogenated and unhydrogenated amorphous silicon carbide thin films

Christidis, T. / Tabbal, M. / Isber, S. et al. | British Library Online Contents | 2001

Photoluminescence of erbium doped microcrystalline silicon thin films produced by reactive magnetron sputtering

Cerqueira, M. F. / Stepikhova, M. V. / Ferreira, J. A. | British Library Online Contents | 2001

The Study of Microcrystalline Silicon Thin Films Prepared by PECVD

Li, C.Y. / Zhang, H. / Li, J. et al. | British Library Online Contents | 2013

Preparation of silicon carbide nitride thin films by sputtering of silicon nitride target

Peng, X. / Song, L. / Meng, J. et al. | British Library Online Contents | 2001

Sputtering Preparation of Silicon Nitride Thin Films for Gate Dielectric Applications

Pereira, L. / Aguas, H. / Igreja, R. et al. | British Library Online Contents | 2004