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The quadratic finite element thermal analysis of silicon irradiated by a pulsed KrF excimer laser
The quadratic finite element thermal analysis of silicon irradiated by a pulsed KrF excimer laser
The quadratic finite element thermal analysis of silicon irradiated by a pulsed KrF excimer laser
Nakamiya, T. (author) / Ikegami, T. (author) / Ebihara, K. (author)
COMPUTATIONAL MATERIALS SCIENCE ; 17 ; 409-413
2000-01-01
5 pages
Article (Journal)
English
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