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Numerical and experimental analysis of pulsed excimer laser processing of silicon carbide

Dutto, C. / Fogarassy, E. / Mathiot, D.

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Numerical and experimental analysis of pulsed excimer laser processing of silicon carbide

Dutto, C. / Fogarassy, E. / Mathiot, D.

Numerical and experimental analysis of pulsed excimer laser processing of silicon carbide

Dutto, C. / Fogarassy, E. / Mathiot, D.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Numerical and experimental analysis of pulsed excimer laser processing of silicon carbide

Contributors:

Dutto, C. (author) / Fogarassy, E. (author) / Mathiot, D. (author)

Published in:

APPLIED SURFACE SCIENCE ; 184 ; 362-366

Publication date:

2001-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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