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Properties of ITO thin films deposited by RF magnetron sputtering at elevated substrate temperature
Properties of ITO thin films deposited by RF magnetron sputtering at elevated substrate temperature
Properties of ITO thin films deposited by RF magnetron sputtering at elevated substrate temperature
Terzini, E. (author) / Thilakan, P. (author) / Minarini, C. (author)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 77 ; 110 - 114
2000-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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