Creep-controlled diffusional hillock formation in blanket aluminum thin films as a mechanism of stress relaxation: Fid-Bau Portal

Creep-controlled diffusional hillock formation in blanket aluminum thin films as a mechanism of stress relaxation

Kim, D.-k. / Nix, W. D. / Deal, M. D. / Plummer, J. D.

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Creep-controlled diffusional hillock formation in blanket aluminum thin films as a mechanism of stress relaxation

Kim, D.-k. / Nix, W. D. / Deal, M. D. / Plummer, J. D.

Creep-controlled diffusional hillock formation in blanket aluminum thin films as a mechanism of stress relaxation

Kim, D.-k. / Nix, W. D. / Deal, M. D. / Plummer, J. D.

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Document information

Title:

Creep-controlled diffusional hillock formation in blanket aluminum thin films as a mechanism of stress relaxation

Contributors:

Kim, D.-k. (author) / Nix, W. D. (author) / Deal, M. D. (author) / Plummer, J. D. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 15 ; 1709-1718

Publication date:

2000-01-01

Size:

10 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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