Barrier layer model determined by XPS data for tunneling current reductions at monolayer nitrided Si-SiO2 interfaces: Fid-Bau Portal

Barrier layer model determined by XPS data for tunneling current reductions at monolayer nitrided Si-SiO2 interfaces

Niimi, H. / Yang, H. / Lucovsky, G. / Keister, J. W. / Rowe, J. E.

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Barrier layer model determined by XPS data for tunneling current reductions at monolayer nitrided Si-SiO2 interfaces

Niimi, H. / Yang, H. / Lucovsky, G. / Keister, J. W. / Rowe, J. E.

Barrier layer model determined by XPS data for tunneling current reductions at monolayer nitrided Si-SiO2 interfaces

Niimi, H. / Yang, H. / Lucovsky, G. / Keister, J. W. / Rowe, J. E.

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Check availability in my library

Order at Subito €

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Document information

Title:

Barrier layer model determined by XPS data for tunneling current reductions at monolayer nitrided Si-SiO2 interfaces

Contributors:

Niimi, H. (author) / Yang, H. (author) / Lucovsky, G. (author) / Keister, J. W. (author) / Rowe, J. E. (author)

Published in:

APPLIED SURFACE SCIENCE ; 166 ; 485-491

Publication date:

2000-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Lucovsky, G. / Niimi, H. / Wu, Y. et al. | British Library Online Contents | 2000

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