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    Self-interstitial migration during ion irradiation of boron delta-doped silicon

    New search for: Kuznetsov, A. Y.
    New search for: Leveque, P.
    New search for: Hallen, A.
    New search for: Svensson, B. G.
    New search for: Nylandsted Larsen, A.

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    Self-interstitial migration during ion irradiation of boron delta-doped silicon

    New search for: Kuznetsov, A. Y.
    New search for: Leveque, P.
    New search for: Hallen, A.
    New search for: Svensson, B. G.
    New search for: Nylandsted Larsen, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Self-interstitial migration during ion irradiation of boron delta-doped silicon

    New search for: Kuznetsov, A. Y.
    New search for: Leveque, P.
    New search for: Hallen, A.
    New search for: Svensson, B. G.
    New search for: Nylandsted Larsen, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Self-interstitial migration during ion irradiation of boron delta-doped silicon

    Contributors:

    Kuznetsov, A. Y. (author) / Leveque, P. (author) / Hallen, A. (author) / Svensson, B. G. (author) / Nylandsted Larsen, A. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 3 ; 279-283

    Publication date:

    2000-01-01

    Size:

    5 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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