Intermetal dielectric process using spin-on glass for ferroelectric memory devices having SrBi~2Ta~2O~9 capacitors: Fid-Bau Portal

Intermetal dielectric process using spin-on glass for ferroelectric memory devices having SrBi~2Ta~2O~9 capacitors

Hong, S.-K. / Yoon, Y. H. / Baek, Y. K. / Lee, C. G. / Suh, C. W. / Lee, S. W. / Kang, Y. M. / Kang, N. S. / Hwang, C. S. / Kwon, O. S.

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Intermetal dielectric process using spin-on glass for ferroelectric memory devices having SrBi~2Ta~2O~9 capacitors

Hong, S.-K. / Yoon, Y. H. / Baek, Y. K. / Lee, C. G. / Suh, C. W. / Lee, S. W. / Kang, Y. M. / Kang, N. S. / Hwang, C. S. / Kwon, O. S.

Intermetal dielectric process using spin-on glass for ferroelectric memory devices having SrBi~2Ta~2O~9 capacitors

Hong, S.-K. / Yoon, Y. H. / Baek, Y. K. / Lee, C. G. / Suh, C. W. / Lee, S. W. / Kang, Y. M. / Kang, N. S. / Hwang, C. S. / Kwon, O. S.

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Title:

Intermetal dielectric process using spin-on glass for ferroelectric memory devices having SrBi~2Ta~2O~9 capacitors

Contributors:

Hong, S.-K. (author) / Yoon, Y. H. (author) / Baek, Y. K. (author) / Lee, C. G. (author) / Suh, C. W. (author) / Lee, S. W. (author) / Kang, Y. M. (author) / Kang, N. S. (author) / Hwang, C. S. (author) / Kwon, O. S. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 15 ; 2822-2829

Publication date:

2000-01-01

Size:

8 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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