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    Spin-on-polymer methylsilsesquioxane for sub-micron intermetal dielectric application

    New search for: Chua, C. T.
    New search for: Sarkar, G.
    New search for: Chooi, S. Y. M.
    New search for: Chan, L.

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    Spin-on-polymer methylsilsesquioxane for sub-micron intermetal dielectric application

    New search for: Chua, C. T.
    New search for: Sarkar, G.
    New search for: Chooi, S. Y. M.
    New search for: Chan, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Spin-on-polymer methylsilsesquioxane for sub-micron intermetal dielectric application

    New search for: Chua, C. T.
    New search for: Sarkar, G.
    New search for: Chooi, S. Y. M.
    New search for: Chan, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    Spin-on-polymer methylsilsesquioxane for sub-micron intermetal dielectric application

    Contributors:

    Chua, C. T. (author) / Sarkar, G. (author) / Chooi, S. Y. M. (author) / Chan, L. (author)

    Published in:

    JOURNAL OF MATERIALS SCIENCE LETTERS ; 18 ; 1437-1440

    Publication date:

    1999-01-01

    Size:

    4 pages

    ISSN:

    0261-8028

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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