Lower temperature and shorter curing time of methylsilsesquioxane for intermetal dielectric application: Fid-Bau Portal

Lower temperature and shorter curing time of methylsilsesquioxane for intermetal dielectric application

Chua, C. T. / Sarkar, G. / Chool, S. Y. M. / Chan, L.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Lower temperature and shorter curing time of methylsilsesquioxane for intermetal dielectric application

Chua, C. T. / Sarkar, G. / Chool, S. Y. M. / Chan, L.

Lower temperature and shorter curing time of methylsilsesquioxane for intermetal dielectric application

Chua, C. T. / Sarkar, G. / Chool, S. Y. M. / Chan, L.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Lower temperature and shorter curing time of methylsilsesquioxane for intermetal dielectric application

Contributors:

Chua, C. T. (author) / Sarkar, G. (author) / Chool, S. Y. M. (author) / Chan, L. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE LETTERS ; 18 ; 33-34

Publication date:

1998-01-01

Size:

2 pages

ISSN:

0261-8028

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Chua, C. T. / Sarkar, G. / Chooi, S. Y. M. et al. | British Library Online Contents | 1999

Moisture uptake and dielectric property of methylsilsesquioxane/high-temperature porogen hybrids and porous low-k films

Che, M.-L. / Teng, J.-Y. / Lai, P.-C. et al. | British Library Online Contents | 2011

New Transparent Methylsilsesquioxane Aerogels and Xerogels with Improved Mechanical Properties

Kanamori, K. / Aizawa, M. / Nakanishi, K. et al. | British Library Online Contents | 2007

Intermetal dielectric process using spin-on glass for ferroelectric memory devices having SrBi~2Ta~2O~9 capacitors

Hong, S.-K. / Yoon, Y. H. / Baek, Y. K. et al. | British Library Online Contents | 2000

Patterned nanoporous poly(methylsilsesquioxane) thin films: a potential high density substrate

Hogan, Z. L. / Kreller, C. R. / Tran, K. A. et al. | British Library Online Contents | 2004