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Surface micro-structuring of silicon by excimer-laser irradiation in reactive atmospheres
Surface micro-structuring of silicon by excimer-laser irradiation in reactive atmospheres
Surface micro-structuring of silicon by excimer-laser irradiation in reactive atmospheres
Pedraza, A. J. (author) / Fowlkes, J. D. (author) / Jesse, S. (author) / Mao, C. (author) / Lowndes, D. H. (author)
APPLIED SURFACE SCIENCE ; 168 ; 251-257
2000-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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