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    Local laser induced rapid thermal oxidation of SOI substrates

    New search for: Huber, M.
    New search for: Deutschmann, R. A.
    New search for: Neumann, R.
    New search for: Brunner, K.
    New search for: Abstreiter, G.

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    Local laser induced rapid thermal oxidation of SOI substrates

    New search for: Huber, M.
    New search for: Deutschmann, R. A.
    New search for: Neumann, R.
    New search for: Brunner, K.
    New search for: Abstreiter, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Local laser induced rapid thermal oxidation of SOI substrates

    New search for: Huber, M.
    New search for: Deutschmann, R. A.
    New search for: Neumann, R.
    New search for: Brunner, K.
    New search for: Abstreiter, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Local laser induced rapid thermal oxidation of SOI substrates

    Contributors:

    Huber, M. (author) / Deutschmann, R. A. (author) / Neumann, R. (author) / Brunner, K. (author) / Abstreiter, G. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 168 ; 204-207

    Publication date:

    2000-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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