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Thermal Oxidation of Silicon Carbide Substrates

Chen, X. / Ning, L. / Wang, Y. / Li, J. / Xu, X. / Hu, X. / Jiang, M.

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Thermal Oxidation of Silicon Carbide Substrates

Chen, X. / Ning, L. / Wang, Y. / Li, J. / Xu, X. / Hu, X. / Jiang, M.

Thermal Oxidation of Silicon Carbide Substrates

Chen, X. / Ning, L. / Wang, Y. / Li, J. / Xu, X. / Hu, X. / Jiang, M.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Thermal Oxidation of Silicon Carbide Substrates

Contributors:

Chen, X. (author) / Ning, L. (author) / Wang, Y. (author) / Li, J. (author) / Xu, X. (author) / Hu, X. (author) / Jiang, M. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE AND TECHNOLOGY -SHENYANG- ; 25 ; 115-118

Publication date:

2009-01-01

Size:

4 pages

ISSN:

1005-0302

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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Jacobson, N.S. / Myers, D.L. / Harder, B.J. | British Library Online Contents | 2012

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Strupinski, W. / Kosciewicz, K. / Weyher, J. et al. | British Library Online Contents | 2009

Oxidation of ion implanted silicon carbide

Makhtari, A. / Raineri, V. / La Via, F. et al. | British Library Online Contents | 2001

Oxidation of porous bonded silicon carbide

Holling, G. E. / Watson, W. G. | British Library Online Contents | 1995