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Design and development of a MEMS-IDT gyroscope
Design and development of a MEMS-IDT gyroscope
Design and development of a MEMS-IDT gyroscope
Varadan, V. K. (author) / Suh, W. D. (author) / Xavier, P. B. (author) / Jose, K. A. (author) / Varadan, V. V. (author)
SMART MATERIALS AND STRUCTURES ; 9 ; 898-905
2000-01-01
8 pages
Article (Journal)
English
DDC:
530
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