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Temperature Model for a Vacuum Packaged MEMS Gyroscope Structure

Cao, H.L. / Li, H.S. / Xu, L. / Ni, Y.F.

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Temperature Model for a Vacuum Packaged MEMS Gyroscope Structure

Cao, H.L. / Li, H.S. / Xu, L. / Ni, Y.F.

Temperature Model for a Vacuum Packaged MEMS Gyroscope Structure

Cao, H.L. / Li, H.S. / Xu, L. / Ni, Y.F.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Temperature Model for a Vacuum Packaged MEMS Gyroscope Structure

Contributors:

Cao, H.L. (author) / Li, H.S. (author) / Xu, L. (author) / Ni, Y.F. (author) / Tang, F.

Published in:

Micro-Nano Technology XIV ; 280-285

KEY ENGINEERING MATERIALS ; 562/565

Publication date:

2013-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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