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Microsensors, microelectromechanical systems (MEMS), and electronics for smart structures and systems

Varadan, V. K. / Varadan, V. V.

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Microsensors, microelectromechanical systems (MEMS), and electronics for smart structures and systems

Varadan, V. K. / Varadan, V. V.

Microsensors, microelectromechanical systems (MEMS), and electronics for smart structures and systems

Varadan, V. K. / Varadan, V. V.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Microsensors, microelectromechanical systems (MEMS), and electronics for smart structures and systems

Contributors:

Varadan, V. K. (author) / Varadan, V. V. (author)

Published in:

SMART MATERIALS AND STRUCTURES ; 9 ; 953-972

Publication date:

2000-01-01

Size:

20 pages

ISSN:

0964-1726

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 530

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