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Integration of optical interconnects and optoelectronic elements on wafer-scale

Dannberg, P. / Erdmann, L. / Krehl, A. / Wachter, C. / Brauer, A.

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Integration of optical interconnects and optoelectronic elements on wafer-scale

Dannberg, P. / Erdmann, L. / Krehl, A. / Wachter, C. / Brauer, A.

Integration of optical interconnects and optoelectronic elements on wafer-scale

Dannberg, P. / Erdmann, L. / Krehl, A. / Wachter, C. / Brauer, A.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Integration of optical interconnects and optoelectronic elements on wafer-scale

Contributors:

Dannberg, P. (author) / Erdmann, L. (author) / Krehl, A. (author) / Wachter, C. (author) / Brauer, A. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 3 ; 437-441

Publication date:

2000-01-01

Size:

5 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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