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    Effect of Ru crystal orientation on the adhesion characteristics of Cu for ultra-large scale integration interconnects

    New search for: Kim, H.
    New search for: Koseki, T.
    New search for: Ohba, T.
    New search for: Ohta, T.
    New search for: Kojima, Y.
    New search for: Sato, H.
    New search for: Hosaka, S.
    New search for: Shimogaki, Y.

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    Effect of Ru crystal orientation on the adhesion characteristics of Cu for ultra-large scale integration interconnects

    New search for: Kim, H.
    New search for: Koseki, T.
    New search for: Ohba, T.
    New search for: Ohta, T.
    New search for: Kojima, Y.
    New search for: Sato, H.
    New search for: Hosaka, S.
    New search for: Shimogaki, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of Ru crystal orientation on the adhesion characteristics of Cu for ultra-large scale integration interconnects

    New search for: Kim, H.
    New search for: Koseki, T.
    New search for: Ohba, T.
    New search for: Ohta, T.
    New search for: Kojima, Y.
    New search for: Sato, H.
    New search for: Hosaka, S.
    New search for: Shimogaki, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Effect of Ru crystal orientation on the adhesion characteristics of Cu for ultra-large scale integration interconnects

    Contributors:

    Kim, H. (author) / Koseki, T. (author) / Ohba, T. (author) / Ohta, T. (author) / Kojima, Y. (author) / Sato, H. (author) / Hosaka, S. (author) / Shimogaki, Y. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 252 ; 3938-3942

    Publication date:

    2006-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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