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Technological processes and modeling of opto-electro-mechanical microstructures

Muller, R. / Moagar Poladian, V. / Pavelescu, I. / Manea, E. / Cristea, D. / Obreja, P.

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Technological processes and modeling of opto-electro-mechanical microstructures

Muller, R. / Moagar Poladian, V. / Pavelescu, I. / Manea, E. / Cristea, D. / Obreja, P.

Technological processes and modeling of opto-electro-mechanical microstructures

Muller, R. / Moagar Poladian, V. / Pavelescu, I. / Manea, E. / Cristea, D. / Obreja, P.

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Order at Subito €

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Document information

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Title:

Technological processes and modeling of opto-electro-mechanical microstructures

Contributors:

Muller, R. (author) / Moagar Poladian, V. (author) / Pavelescu, I. (author) / Manea, E. (author) / Cristea, D. (author) / Obreja, P. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 3 ; 427-431

Publication date:

2000-01-01

Size:

5 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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