On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications: Fid-Bau Portal

On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications

Yan, J. / Yoshino, M. / Kuriagawa1, T. / Shirakashi, T. / Syoji, K. / Komanduri, R.

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On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications

Yan, J. / Yoshino, M. / Kuriagawa1, T. / Shirakashi, T. / Syoji, K. / Komanduri, R.

On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications

Yan, J. / Yoshino, M. / Kuriagawa1, T. / Shirakashi, T. / Syoji, K. / Komanduri, R.

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Check availability in my library

Order at Subito €

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Document information

Title:

On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications

Contributors:

Yan, J. (author) / Yoshino, M. (author) / Kuriagawa1, T. (author) / Shirakashi, T. (author) / Syoji, K. (author) / Komanduri, R. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- A ; 297 ; 230 - 234

Publication date:

2001-01-01

Size:

5 pages

ISSN:

0921-5093

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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