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Ion Bombardment Induced Damage in Silicon Carbide Studied by Ion Beam Analytical Methods
Ion Bombardment Induced Damage in Silicon Carbide Studied by Ion Beam Analytical Methods
Ion Bombardment Induced Damage in Silicon Carbide Studied by Ion Beam Analytical Methods
Szilagyi, E. (author) / Khanh, N. Q. (author) / Horvath, Z. E. (author) / Lohner, T. (author) / Battistig, G. (author) / Zolnai, Z. (author) / Kotai, E. (author) / Gyulai, J. (author)
MATERIALS SCIENCE FORUM ; 353/356 ; 271-274
2001-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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