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Reactive Ion Etching Induced Surface Damage of Silicon Carbide
Reactive Ion Etching Induced Surface Damage of Silicon Carbide
Reactive Ion Etching Induced Surface Damage of Silicon Carbide
Xia, J. H. (author) / Rusli (author) / Gopalakrishan, R. (author) / Choy, S. F. (author) / Tin, C. C. (author) / Ahn, J. (author) / Yoon, S. F. (author) / Nipoti, R. / Poggi, A. / Scorzoni, A.
2005-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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