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    High-Resolution XRD Evaluation of Thick 4H-SiC Epitaxial Layers

    New search for: Jacobsson, H.
    New search for: Yakimova, R.
    New search for: Syvajarvi, M.
    New search for: Birch, J.
    New search for: Tuomi, T.
    New search for: Janzen, E.

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    High-Resolution XRD Evaluation of Thick 4H-SiC Epitaxial Layers

    New search for: Jacobsson, H.
    New search for: Yakimova, R.
    New search for: Syvajarvi, M.
    New search for: Birch, J.
    New search for: Tuomi, T.
    New search for: Janzen, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    High-Resolution XRD Evaluation of Thick 4H-SiC Epitaxial Layers

    New search for: Jacobsson, H.
    New search for: Yakimova, R.
    New search for: Syvajarvi, M.
    New search for: Birch, J.
    New search for: Tuomi, T.
    New search for: Janzen, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    High-Resolution XRD Evaluation of Thick 4H-SiC Epitaxial Layers

    Contributors:

    Jacobsson, H. (author) / Yakimova, R. (author) / Syvajarvi, M. (author) / Birch, J. (author) / Tuomi, T. (author) / Janzen, E. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 353/356 ; 291-294

    Publication date:

    2001-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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