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    Behavior of background impurities in thick 4H-SiC epitaxial layers

    New search for: Yakimova, R.
    New search for: Syvajarvi, M.
    New search for: Janzen, E.

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    Behavior of background impurities in thick 4H-SiC epitaxial layers

    New search for: Yakimova, R.
    New search for: Syvajarvi, M.
    New search for: Janzen, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Behavior of background impurities in thick 4H-SiC epitaxial layers

    New search for: Yakimova, R.
    New search for: Syvajarvi, M.
    New search for: Janzen, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Title:

    Behavior of background impurities in thick 4H-SiC epitaxial layers

    Contributors:

    Kakanakova-Georgieva, A. (author) / Yakimova, R. (author) / Syvajarvi, M. (author) / Janzen, E. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 184 ; 242-246

    Publication date:

    2001-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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