EPR Study of Proton Implantation Induced Intrinsic Defects in 6H- and 4H-SiC: Fid-Bau Portal

EPR Study of Proton Implantation Induced Intrinsic Defects in 6H- and 4H-SiC

von Bardeleben, H. J. / Cantin, J. L.

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EPR Study of Proton Implantation Induced Intrinsic Defects in 6H- and 4H-SiC

von Bardeleben, H. J. / Cantin, J. L.

EPR Study of Proton Implantation Induced Intrinsic Defects in 6H- and 4H-SiC

von Bardeleben, H. J. / Cantin, J. L.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

EPR Study of Proton Implantation Induced Intrinsic Defects in 6H- and 4H-SiC

Contributors:

von Bardeleben, H. J. (author) / Cantin, J. L. (author)

Published in:

MATERIALS SCIENCE FORUM ; 353/356 ; 513-516

Publication date:

2001-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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