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Internal friction study of ion-implantation induced defects in silicon

Liu, X. / Pohl, R. O. / Photiadis, D. M.

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Internal friction study of ion-implantation induced defects in silicon

Liu, X. / Pohl, R. O. / Photiadis, D. M.

Internal friction study of ion-implantation induced defects in silicon

Liu, X. / Pohl, R. O. / Photiadis, D. M.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Internal friction study of ion-implantation induced defects in silicon

Contributors:

Liu, X. (author) / Pohl, R. O. (author) / Photiadis, D. M. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING A ; 442 ; 63-66

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0921-5093

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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