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Enhancement of Electrical Activation of Aluminum Acceptors in 6H-SiC by Co-Implantation of Carbon Ions

Ohshima, T. / Itoh, H. / Yoshikawa, M.

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Enhancement of Electrical Activation of Aluminum Acceptors in 6H-SiC by Co-Implantation of Carbon Ions

Ohshima, T. / Itoh, H. / Yoshikawa, M.

Enhancement of Electrical Activation of Aluminum Acceptors in 6H-SiC by Co-Implantation of Carbon Ions

Ohshima, T. / Itoh, H. / Yoshikawa, M.

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Check availability in my library

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Document information

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Document information

Title:

Enhancement of Electrical Activation of Aluminum Acceptors in 6H-SiC by Co-Implantation of Carbon Ions

Contributors:

Ohshima, T. (author) / Itoh, H. (author) / Yoshikawa, M. (author)

Published in:

MATERIALS SCIENCE FORUM ; 353/356 ; 575-578

Publication date:

2001-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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