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Implantation of Al and B Acceptors into Alpha-SiC and pn Junction Diodes
Implantation of Al and B Acceptors into Alpha-SiC and pn Junction Diodes
Implantation of Al and B Acceptors into Alpha-SiC and pn Junction Diodes
Takemura, O. (author) / Kimoto, T. (author) / Matsunami, H. (author) / Nakata, T. (author) / Watanabe, M. (author) / Inoue, M. (author)
MATERIALS SCIENCE FORUM ; 264/268 ; 701-704
1998-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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