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Crystallization-induced stress in tungsten nitride thin films

Shen, Y. G. / Mai, Y. W.

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Crystallization-induced stress in tungsten nitride thin films

Shen, Y. G. / Mai, Y. W.

Crystallization-induced stress in tungsten nitride thin films

Shen, Y. G. / Mai, Y. W.

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Order at Subito €

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Document information

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Document information

Title:

Crystallization-induced stress in tungsten nitride thin films

Contributors:

Shen, Y. G. (author) / Mai, Y. W. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE LETTERS ; 19 ; 1941-1944

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0261-8028

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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