Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Bias induced structural changes in tungsten nitride films deposited by unbalanced magnetron sputtering

    New search for: Guruvenket, S.
    New search for: Mohan Rao, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Bias induced structural changes in tungsten nitride films deposited by unbalanced magnetron sputtering

    New search for: Guruvenket, S.
    New search for: Mohan Rao, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Bias induced structural changes in tungsten nitride films deposited by unbalanced magnetron sputtering

    New search for: Guruvenket, S.
    New search for: Mohan Rao, G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Bias induced structural changes in tungsten nitride films deposited by unbalanced magnetron sputtering

    Contributors:

    Guruvenket, S. (author) / Mohan Rao, G. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 106 ; 172-176

    Publication date:

    2004-01-01

    Size:

    5 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Tribological characterization of tungsten nitride coatings deposited by reactive magnetron sputtering

    Polcar, T. / Parreira, N. M. / Cavaleiro, A. | British Library Online Contents | 2007

    Mechanical and tribological properties of titanium-aluminium-nitride films deposited by reactive close-field unbalanced magnetron sputtering

    Shum, P. W. / Tam, W. C. / Li, K. Y. et al. | British Library Online Contents | 2004

    Composition and Properties of Silicon Nitride Thin Films Deposited by Mid-frequency Dual-target Unbalanced Magnetron Sputtering

    Wang, C. / Mu, Z.-x. / Liu, B.-b. et al. | British Library Online Contents | 2011

    Preferentially oriented vanadium nitride films deposited by magnetron sputtering

    Suszko, T. / Gulbinski, W. / Urbanowicz, A. | British Library Online Contents | 2011

    Influence of substrate bias voltage on structure and properties of the CrAlN films deposited by unbalanced magnetron sputtering

    Lv, Y. / Ji, L. / Liu, X. et al. | British Library Online Contents | 2012

    Back to top