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Optical and electrical properties of Ge-implanted SiO2 layers on n-Si and p-Si
Optical and electrical properties of Ge-implanted SiO2 layers on n-Si and p-Si
Optical and electrical properties of Ge-implanted SiO2 layers on n-Si and p-Si
Lee, W. S. (author) / Jeong, J. Y. (author) / Kim, H. B. (author) / Chae, K. H. (author) / Whang, C. N. (author) / Im, S. (author) / Song, J. H. (author)
APPLIED SURFACE SCIENCE ; 169-170 ; 463-467
2001-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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