Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Mechanical and tribological properties of titanium-aluminium-nitride films deposited by reactive close-field unbalanced magnetron sputtering

    New search for: Shum, P. W.
    New search for: Tam, W. C.
    New search for: Li, K. Y.
    New search for: Zhou, Z. F.
    New search for: Shen, Y. G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Mechanical and tribological properties of titanium-aluminium-nitride films deposited by reactive close-field unbalanced magnetron sputtering

    New search for: Shum, P. W.
    New search for: Tam, W. C.
    New search for: Li, K. Y.
    New search for: Zhou, Z. F.
    New search for: Shen, Y. G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Mechanical and tribological properties of titanium-aluminium-nitride films deposited by reactive close-field unbalanced magnetron sputtering

    New search for: Shum, P. W.
    New search for: Tam, W. C.
    New search for: Li, K. Y.
    New search for: Zhou, Z. F.
    New search for: Shen, Y. G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Mechanical and tribological properties of titanium-aluminium-nitride films deposited by reactive close-field unbalanced magnetron sputtering

    Contributors:

    Shum, P. W. (author) / Tam, W. C. (author) / Li, K. Y. (author) / Zhou, Z. F. (author) / Shen, Y. G. (author)

    Published in:

    WEAR -LAUSANNE- ; 257 ; 1030-1040

    Publication date:

    2004-01-01

    Size:

    11 pages

    ISSN:

    0043-1648

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11292

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Mechanical and tribological properties of CNx films deposited by reactive magnetron sputtering

    Broitman, E. / Hellgren, N. / Wanstrand, O. et al. | British Library Online Contents | 2001

    Structure, mechanical and tribological properties of HfCx films deposited by reactive magnetron sputtering

    Shuo, W. / Kan, Z. / Tao, A. et al. | British Library Online Contents | 2015

    Tribological characterization of tungsten nitride coatings deposited by reactive magnetron sputtering

    Polcar, T. / Parreira, N. M. / Cavaleiro, A. | British Library Online Contents | 2007

    Titanium Nitride - Silicon Nitride Composite Coatings Deposited by Reactive Magnetron Sputtering

    Patscheider, J. / Diserens, M. / Levy, F. | British Library Online Contents | 1998

    Bias induced structural changes in tungsten nitride films deposited by unbalanced magnetron sputtering

    Guruvenket, S. / Mohan Rao, G. | British Library Online Contents | 2004

    Back to top