Structure, mechanical and tribological properties of HfCx films deposited by reactive magnetron sputtering: Fid-Bau Portal

Structure, mechanical and tribological properties of HfCx films deposited by reactive magnetron sputtering

Shuo, W. / Kan, Z. / Tao, A. / Chaoquan, H. / Qingnan, M. / Yuanzhi, M. / Mao, W. / Weitao, Z.

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Structure, mechanical and tribological properties of HfCx films deposited by reactive magnetron sputtering

Shuo, W. / Kan, Z. / Tao, A. / Chaoquan, H. / Qingnan, M. / Yuanzhi, M. / Mao, W. / Weitao, Z.

Structure, mechanical and tribological properties of HfCx films deposited by reactive magnetron sputtering

Shuo, W. / Kan, Z. / Tao, A. / Chaoquan, H. / Qingnan, M. / Yuanzhi, M. / Mao, W. / Weitao, Z.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Structure, mechanical and tribological properties of HfCx films deposited by reactive magnetron sputtering

Contributors:

Shuo, W. (author) / Kan, Z. (author) / Tao, A. (author) / Chaoquan, H. (author) / Qingnan, M. (author) / Yuanzhi, M. (author) / Mao, W. (author) / Weitao, Z. (author)

Published in:

APPLIED SURFACE SCIENCE ; 327 ; 68-76

Publication date:

2015-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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