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SILICON NITRIDE SPUTTERING TARGET, METHOD FOR MANUFACTURING THE SAME, AND SILICON NITRIDE FILM
To provide a silicon nitride sputtering target capable of depositing a silicon nitride film having a variation in optical properties (a transmittance and a refractive index).SOLUTION: A silicon nitride sputtering target including silicon, nitrogen, oxygen and an additive element α consisting of the third group element has a density distribution of 5% or less. When including silicon oxide and setting the content of the additive element α to [α] and the content of oxygen to [O] by mass ratio, [α]/([O]+[α]) is preferably within a range of 0.01 or more and 0.70 or less.SELECTED DRAWING: None
【課題】光学特性（透過率および屈折率）のばらつきが小さい窒化ケイ素膜を成膜することが可能な窒化ケイ素スパッタリングターゲットを提供する。【解決手段】ケイ素と、窒素と、酸素と、第３族元素からなる添加元素αを含み、密度分布が５％以下である。酸化ケイ素を含有し、質量比で、前記添加元素αの含有量を〔α〕、酸素の含有量を〔Ｏ〕とした場合に、〔α〕／（〔Ｏ〕＋〔α〕）が０．０１以上０．７０以下の範囲内とされていることが好ましい。【選択図】なし
SILICON NITRIDE SPUTTERING TARGET, METHOD FOR MANUFACTURING THE SAME, AND SILICON NITRIDE FILM
To provide a silicon nitride sputtering target capable of depositing a silicon nitride film having a variation in optical properties (a transmittance and a refractive index).SOLUTION: A silicon nitride sputtering target including silicon, nitrogen, oxygen and an additive element α consisting of the third group element has a density distribution of 5% or less. When including silicon oxide and setting the content of the additive element α to [α] and the content of oxygen to [O] by mass ratio, [α]/([O]+[α]) is preferably within a range of 0.01 or more and 0.70 or less.SELECTED DRAWING: None
【課題】光学特性（透過率および屈折率）のばらつきが小さい窒化ケイ素膜を成膜することが可能な窒化ケイ素スパッタリングターゲットを提供する。【解決手段】ケイ素と、窒素と、酸素と、第３族元素からなる添加元素αを含み、密度分布が５％以下である。酸化ケイ素を含有し、質量比で、前記添加元素αの含有量を〔α〕、酸素の含有量を〔Ｏ〕とした場合に、〔α〕／（〔Ｏ〕＋〔α〕）が０．０１以上０．７０以下の範囲内とされていることが好ましい。【選択図】なし
SILICON NITRIDE SPUTTERING TARGET, METHOD FOR MANUFACTURING THE SAME, AND SILICON NITRIDE FILM
窒化ケイ素スパッタリングターゲット、窒化ケイ素スパッタリングターゲットの製造方法、および、窒化ケイ素膜
KATO SHINJI (author) / UMEMOTO KEITA (author)
2022-12-15
Patent
Electronic Resource
Japanese
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