Deposition of epitaxial transition metal carbide films and superlattices by simultaneous direct current metal magnetron sputtering and C~6~0 evaporation: Fid-Bau Portal

Deposition of epitaxial transition metal carbide films and superlattices by simultaneous direct current metal magnetron sputtering and C~6~0 evaporation

Hogberg, H. / Birch, J. / Johansson, M. P. / Hultman, L. / Jansson, U.

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Deposition of epitaxial transition metal carbide films and superlattices by simultaneous direct current metal magnetron sputtering and C~6~0 evaporation

Hogberg, H. / Birch, J. / Johansson, M. P. / Hultman, L. / Jansson, U.

Deposition of epitaxial transition metal carbide films and superlattices by simultaneous direct current metal magnetron sputtering and C~6~0 evaporation

Hogberg, H. / Birch, J. / Johansson, M. P. / Hultman, L. / Jansson, U.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Deposition of epitaxial transition metal carbide films and superlattices by simultaneous direct current metal magnetron sputtering and C~6~0 evaporation

Contributors:

Hogberg, H. (author) / Birch, J. (author) / Johansson, M. P. (author) / Hultman, L. (author) / Jansson, U. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 16 ; 633-643

Publication date:

2001-01-01

Size:

11 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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