Deposition of epitaxial transition metal carbide films and superlattices by simultaneous direct current metal magnetron sputtering and C~6~0 evaporation: Fid-Bau Portal

Deposition of epitaxial transition metal carbide films and superlattices by simultaneous direct current metal magnetron sputtering and C~6~0 evaporation

Hogberg, H. / Birch, J. / Johansson, M. P. / Hultman, L. / Jansson, U.

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Deposition of epitaxial transition metal carbide films and superlattices by simultaneous direct current metal magnetron sputtering and C~6~0 evaporation

Hogberg, H. / Birch, J. / Johansson, M. P. / Hultman, L. / Jansson, U.

Deposition of epitaxial transition metal carbide films and superlattices by simultaneous direct current metal magnetron sputtering and C~6~0 evaporation

Hogberg, H. / Birch, J. / Johansson, M. P. / Hultman, L. / Jansson, U.

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Titel:

Deposition of epitaxial transition metal carbide films and superlattices by simultaneous direct current metal magnetron sputtering and C~6~0 evaporation

Beteiligte:

Hogberg, H. (Autor:in) / Birch, J. (Autor:in) / Johansson, M. P. (Autor:in) / Hultman, L. (Autor:in) / Jansson, U. (Autor:in)

Erschienen in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 16 ; 633-643

Erscheinungsdatum:

01.01.2001

Format / Umfang:

11 pages

ISSN:

0884-2914

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11

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