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Low-temperature photoluminescence characterization of hydrogen- and helium-implanted silicon

Ulyashin, A. G. / Job, R. / Fahrner, W. R. / Mudryi, A. V. / Patuk, A. I. / Shakin, I. A.

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Low-temperature photoluminescence characterization of hydrogen- and helium-implanted silicon

Ulyashin, A. G. / Job, R. / Fahrner, W. R. / Mudryi, A. V. / Patuk, A. I. / Shakin, I. A.

Low-temperature photoluminescence characterization of hydrogen- and helium-implanted silicon

Ulyashin, A. G. / Job, R. / Fahrner, W. R. / Mudryi, A. V. / Patuk, A. I. / Shakin, I. A.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Low-temperature photoluminescence characterization of hydrogen- and helium-implanted silicon

Contributors:

Ulyashin, A. G. (author) / Job, R. (author) / Fahrner, W. R. (author) / Mudryi, A. V. (author) / Patuk, A. I. (author) / Shakin, I. A. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 4 ; 297-299

Publication date:

2001-01-01

Size:

3 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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Misiuk, A. / Bak-Misiuk, J. / Kaniewska, M. et al. | British Library Online Contents | 2002

Evolution of Defect and Hydrogen-Related Low Temperature Photoluminescence Spectra with Annealing for Hydrogen or Helium Implanted 6H SiC

Yan, F. / Devaty, R. P. / Choyke, W. J. et al. | British Library Online Contents | 2005

The photoluminescence of Pt-implanted silicon

Alves, E. / Bollmann, J. / Deicher, M. et al. | British Library Online Contents | 1997

Ultradense gas bubbles in hydrogen- or helium-implanted (or coimplanted) silicon

Cerofolini, G.F. / Calzolari, G. / Corni, F. et al. | British Library Online Contents | 2000