Formation of ytterbium silicide on (111) and (001)Si by solid-state reactions: Fid-Bau Portal

Formation of ytterbium silicide on (111) and (001)Si by solid-state reactions

Chi, K. S. / Chen, L. J.

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Formation of ytterbium silicide on (111) and (001)Si by solid-state reactions

Chi, K. S. / Chen, L. J.

Formation of ytterbium silicide on (111) and (001)Si by solid-state reactions

Chi, K. S. / Chen, L. J.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Formation of ytterbium silicide on (111) and (001)Si by solid-state reactions

Contributors:

Chi, K. S. (author) / Chen, L. J. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 4 ; 269-272

Publication date:

2001-01-01

Size:

4 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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Lateral silicide formation and influence of impurities on silicide formation

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