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    Composition analysis of oxidized buried SiC layers in silicon from EFTEM images

    New search for: Attenberger, W.
    New search for: Lindner, J. K.
    New search for: Schmid, M.
    New search for: Gerlach, J. W.
    New search for: Stritzker, B.

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    Composition analysis of oxidized buried SiC layers in silicon from EFTEM images

    New search for: Attenberger, W.
    New search for: Lindner, J. K.
    New search for: Schmid, M.
    New search for: Gerlach, J. W.
    New search for: Stritzker, B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Composition analysis of oxidized buried SiC layers in silicon from EFTEM images

    New search for: Attenberger, W.
    New search for: Lindner, J. K.
    New search for: Schmid, M.
    New search for: Gerlach, J. W.
    New search for: Stritzker, B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Composition analysis of oxidized buried SiC layers in silicon from EFTEM images

    Contributors:

    Attenberger, W. (author) / Lindner, J. K. (author) / Schmid, M. (author) / Gerlach, J. W. (author) / Stritzker, B. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 4 ; 187-190

    Publication date:

    2001-01-01

    Size:

    4 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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