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    Evaluation of different oxidation methods for silicon for scanning capacitance microscopy

    New search for: Bowallius, O.
    New search for: Anand, S.

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    Evaluation of different oxidation methods for silicon for scanning capacitance microscopy

    New search for: Bowallius, O.
    New search for: Anand, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Evaluation of different oxidation methods for silicon for scanning capacitance microscopy

    New search for: Bowallius, O.
    New search for: Anand, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
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    Document information
    Title:

    Evaluation of different oxidation methods for silicon for scanning capacitance microscopy

    Contributors:

    Bowallius, O. (author) / Anand, S. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 4 ; 81-84

    Publication date:

    2001-01-01

    Size:

    4 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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