Phase formation at rapid thermal annealing of Al/Ti/Ni ohmic contacts on 4H-SiC: Fid-Bau Portal

Phase formation at rapid thermal annealing of Al/Ti/Ni ohmic contacts on 4H-SiC

Vassilevski, K. / Zekentes, K. / Tsagaraki, K. / Constantinidis, G. / Nikitina, I.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Phase formation at rapid thermal annealing of Al/Ti/Ni ohmic contacts on 4H-SiC

Vassilevski, K. / Zekentes, K. / Tsagaraki, K. / Constantinidis, G. / Nikitina, I.

Phase formation at rapid thermal annealing of Al/Ti/Ni ohmic contacts on 4H-SiC

Vassilevski, K. / Zekentes, K. / Tsagaraki, K. / Constantinidis, G. / Nikitina, I.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Phase formation at rapid thermal annealing of Al/Ti/Ni ohmic contacts on 4H-SiC

Contributors:

Vassilevski, K. (author) / Zekentes, K. (author) / Tsagaraki, K. (author) / Constantinidis, G. (author) / Nikitina, I. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 80 ; 370 - 373

Publication date:

2001-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Chen, W. D. / Xie, X. L. / Cui, Y. D. et al. | British Library Online Contents | 1996

Microstructure studies of PdGe/Ge ohmic contacts to n-type GaAs formed by rapid thermal annealing

Chen, W. D. / Xie, X. L. / Cui, Y. D. et al. | British Library Online Contents | 1996

Rapid thermal annealing of Zr/SiGeC contacts

Barthula, M. / Aubry-Fortuna, V. / Meyer, F. et al. | British Library Online Contents | 1998

Influence of Thermal Annealing on Ohmic Contacts and Device Isolation in AlGaN/GaN Heterostructures

Roccaforte, F. / Iucolano, F. / Giannazzo, F. et al. | British Library Online Contents | 2009

Phase Formation at Rapid Thermal Annealing of Nickel Contacts on C-Face n-Type 4H-SiC

Ferrero, S. / Albonico, A. / Meotto, U. M. et al. | British Library Online Contents | 2005