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Phase formation at rapid thermal annealing of Al/Ti/Ni ohmic contacts on 4H-SiC
Phase formation at rapid thermal annealing of Al/Ti/Ni ohmic contacts on 4H-SiC
Phase formation at rapid thermal annealing of Al/Ti/Ni ohmic contacts on 4H-SiC
Vassilevski, K. (Autor:in) / Zekentes, K. (Autor:in) / Tsagaraki, K. (Autor:in) / Constantinidis, G. (Autor:in) / Nikitina, I. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 80 ; 370 - 373
01.01.2001
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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