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Surface roughness studies on 4H-SiC layers grown by liquid phase epitaxy

Kuznetsov, N. / Tsagaraki, K. / Bauman, D. / Morozov, A. / Nikitina, I. / Ivantsov, V. / Zekentes, K.

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Surface roughness studies on 4H-SiC layers grown by liquid phase epitaxy

Kuznetsov, N. / Tsagaraki, K. / Bauman, D. / Morozov, A. / Nikitina, I. / Ivantsov, V. / Zekentes, K.

Surface roughness studies on 4H-SiC layers grown by liquid phase epitaxy

Kuznetsov, N. / Tsagaraki, K. / Bauman, D. / Morozov, A. / Nikitina, I. / Ivantsov, V. / Zekentes, K.

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Document information

Title:

Surface roughness studies on 4H-SiC layers grown by liquid phase epitaxy

Contributors:

Kuznetsov, N. (author) / Tsagaraki, K. (author) / Bauman, D. (author) / Morozov, A. (author) / Nikitina, I. (author) / Ivantsov, V. (author) / Zekentes, K. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 80 ; 345 - 347

Publication date:

2001-01-01

Size:

3 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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