Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Makyoh topography for the morphological study of compound semiconductor wafers and structures

    New search for: Riesz, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Makyoh topography for the morphological study of compound semiconductor wafers and structures

    New search for: Riesz, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Makyoh topography for the morphological study of compound semiconductor wafers and structures

    New search for: Riesz, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Makyoh topography for the morphological study of compound semiconductor wafers and structures

    Contributors:

    Riesz, F. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 80 ; 220 - 223

    Publication date:

    2001-01-01

    Size:

    4 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Sensitivity of Makyoh topography

    Riesz, F. | British Library Online Contents | 2006

    Makyoh-topography study of grooves scratched and etched in single-crystal semiconductors

    Riesz, F. | British Library Online Contents | 2000

    2K PL topography of silicon doped VGF GaAs wafers

    Baeumler, M. / Maier, M. / Herres, N. et al. | British Library Online Contents | 2002

    Characteristics of the Wheel Surface Topography in Ultra-precision Grinding of Silicon Wafers

    Huo, F.W. / Guo, D.M. / Kang, R.K. et al. | British Library Online Contents | 2009

    Defect specific topography of GaAs wafers by microwave-detected photo induced current transient spectroscopy

    Grundig-Wendrock, B. / Jurisch, M. / Niklas, J. R. | British Library Online Contents | 2002

    Back to top