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Selective etching during the electrochemical C-V profiling of PM-HEMTs

Kayambaki, M. / Tsagaraki, K. / Lagadas, M. / Panayotatos, P.

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Selective etching during the electrochemical C-V profiling of PM-HEMTs

Kayambaki, M. / Tsagaraki, K. / Lagadas, M. / Panayotatos, P.

Selective etching during the electrochemical C-V profiling of PM-HEMTs

Kayambaki, M. / Tsagaraki, K. / Lagadas, M. / Panayotatos, P.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Selective etching during the electrochemical C-V profiling of PM-HEMTs

Contributors:

Kayambaki, M. (author) / Tsagaraki, K. (author) / Lagadas, M. (author) / Panayotatos, P. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 80 ; 164 - 167

Publication date:

2001-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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