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    Chemical mapping of patterned polymer photoresists by near-field infrared microscopy

    New search for: Dragnea, B.
    New search for: Preusser, J.
    New search for: Szarko, J. M.
    New search for: McDonough, L. A.
    New search for: Leone, S. R.
    New search for: Hinsberg, W. D.

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    Chemical mapping of patterned polymer photoresists by near-field infrared microscopy

    New search for: Dragnea, B.
    New search for: Preusser, J.
    New search for: Szarko, J. M.
    New search for: McDonough, L. A.
    New search for: Leone, S. R.
    New search for: Hinsberg, W. D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Chemical mapping of patterned polymer photoresists by near-field infrared microscopy

    New search for: Dragnea, B.
    New search for: Preusser, J.
    New search for: Szarko, J. M.
    New search for: McDonough, L. A.
    New search for: Leone, S. R.
    New search for: Hinsberg, W. D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Chemical mapping of patterned polymer photoresists by near-field infrared microscopy

    Contributors:

    Dragnea, B. (author) / Preusser, J. (author) / Szarko, J. M. (author) / McDonough, L. A. (author) / Leone, S. R. (author) / Hinsberg, W. D. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 175-176 ; 783-789

    Publication date:

    2001-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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