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    Characterization of TiOx film prepared by plasma enhanced chemical vapor deposition using a multi-jet hollow cathode plasma source

    New search for: Nakamura, M.
    New search for: Korzec, D.
    New search for: Aoki, T.
    New search for: Engemann, J.
    New search for: Hatanaka, Y.

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    Characterization of TiOx film prepared by plasma enhanced chemical vapor deposition using a multi-jet hollow cathode plasma source

    New search for: Nakamura, M.
    New search for: Korzec, D.
    New search for: Aoki, T.
    New search for: Engemann, J.
    New search for: Hatanaka, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characterization of TiOx film prepared by plasma enhanced chemical vapor deposition using a multi-jet hollow cathode plasma source

    New search for: Nakamura, M.
    New search for: Korzec, D.
    New search for: Aoki, T.
    New search for: Engemann, J.
    New search for: Hatanaka, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Characterization of TiOx film prepared by plasma enhanced chemical vapor deposition using a multi-jet hollow cathode plasma source

    Contributors:

    Nakamura, M. (author) / Korzec, D. (author) / Aoki, T. (author) / Engemann, J. (author) / Hatanaka, Y. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 175-176 ; 697-702

    Publication date:

    2001-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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